Sökning: "Thin Film Deposition"

Visar resultat 1 - 5 av 262 avhandlingar innehållade orden Thin Film Deposition.

1. 1. AlN Thin Film Electroacoustic Devices

   Författare :Gonzalo Fuentes Iriarte; I.V. Katardjiev; G.F. Iriarte; Uppsala universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electrical engineering; Elektroteknik; elektronik och fotonik; Electrical engineering; electronics and photonics; Elektroteknik; elektronik och fotonik; elektronik; Electronics;

   Sammanfattning : Recently, the enormous growth in personal communications systems (PCS), satellite communication and various other forms of wireless data communication has made analogue frequency control a key issue as the operation frequency increases to the low/medium GHz range. Surface acoustic wave (SAW) and bulk acoustic wave (BAW) electroacoustic devices are widely used today in a variety of applications both in consumer electronics as well as in specialized scientific and military equipment where frequency control is required. LÄS MER

3. 2. Thin Film Synthesis of Nickel Containing Compounds

   Författare :Erik Lindahl; Jan-Otto Carlsson; Jens Birch; Uppsala universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Chemical Vapor Deposition; CVD; Atomic Layer Deposition; ALD; Nickel nitride; Nickel oxide; Nickel; Epitaxy; multilayer; Thin film; Inorganic chemistry; Oorganisk kemi; Inorganic Chemistry; Oorganisk kemi;

   Sammanfattning : Most electrical, magnetic or optical devices are today based on several, usually extremely thin layers of different materials.  In this thesis chemical synthesis processes have been developed for growth of less stable and metastable layers, and even multilayers, of nickel containing compounds. LÄS MER

4. 3. Engineered ion-bombardment as a tool in thin film deposition

   Författare :Rommel Paulo B. Viloan; Ulf Helmersson; Daniel Lundin; Rainer Hippler; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; HiPIMS; Bipolar HiPIMS; Ion-bombardment; Thin film;

   Sammanfattning : Energetic-ion bombardment has become an attractive route to modify the crystal growth and deposit high quality thin films. In high-power impulse magnetron sputtering (HiPIMS) where the discharge is characterized by a significant amount of ions of the sputter-ejected atoms, energetic-ion bombardment effects could not be underestimated. LÄS MER

5. 4. Reactive Sputter Deposition of Functional Thin Films

   Författare :Lina Liljeholm; Jörgen Olsson; Ilia Katardjiev; Tomas Nyberg; Gonzalo Fuentes Iriarte; Uppsala universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; thin film; reactive sputtering; coating; resonator; sensor; FBAR; SMR; aluminum nitride; Al; B N; Teknisk fysik med inriktning mot elektronik; Engineering Science with specialization in Electronics;

   Sammanfattning : Thin film technology is of great significance for a variety of products, such as electronics, anti-reflective or hard coatings, sensors, solar cells, etc. This thesis concerns the synthesis of thin functional films, reactive magnetron sputter deposition process as such and the physical and functional characterization of the thin films synthesized. LÄS MER

7. 5. Thin films for indoor air monitoring : Measurements of Volatile Organic Compounds

   Författare :Umut Cindemir; Niklasson Gunnar; Claes-Göran Granqvist; Lars Österlund; Magnus Willander; Uppsala universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; gas sensor; thin film; adcanced gas depostion; sputter deposition; nickel oxide; gold nanoparticles; indium tin oxide; acetaldehyde; formaldehyde;

   Sammanfattning : Volatile organic compounds (VOCs) in the indoor air have adverse effects on the dwellers residing in a building or a vehicle. One of these effects is called sick building syndrome (SBS). LÄS MER