Sökning: "Technological sciences Teknik Fysik Physics beam control direct writing proton beam lithography"

Hittade 1 avhandling innehållade orden Technological sciences Teknik Fysik Physics beam control direct writing proton beam lithography.

1. 1. Direct writing with an MeV proton beam: Development and Applications

   Författare :Vaida Auzelyte; Kärnfysik; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; direct writing; beam control; Physics; Fysik; Teknik; Technological sciences; proton beam; lithography; Fysicumarkivet A:2006:Auželytė;

   Sammanfattning : This thesis presents work aimed at the development and application of a new lithography system for direct material patterning with the MeV proton beam at the Lund Nuclear Microprobe (NMP) facility. MeV proton beams are advantageous for use as a patterning tool due to their deep and well defined penetration through matter and their highly local energy deposition. LÄS MER