Sökning: "Silicon Micromachining"

Visar resultat 11 - 15 av 33 avhandlingar innehållade orden Silicon Micromachining.

  1. 11. Silicon micromachining with applications in sensors and actuators

    Författare :Lars Tenerz; Uppsala universitet; []
    Nyckelord :NATURAL SCIENCES; NATURVETENSKAP;

    Sammanfattning : .... LÄS MER

  3. 12. Fabrication of Integrated HBV Multipliers for THz Generation

    Författare :Aleksandra Malko; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; silicon.; indium phosphide; frequency multipliers; power sensors; Epitaxial transfer; heterostructure barrier varactors;

    Sammanfattning : The main objective of this licentiate thesis is to demonstrate silicon integrated HBV frequency multipliers for THz generation with RF performance comparable with InP technology. The choice of silicon is motivatedby better thermal and mechanical properties, cost and ease of integration compared to III-V semiconductor substrates. LÄS MER

  4. 13. Additive Manufacturing and Integration of 3D MEMS using Ultrafast Lasers and Magnetic Assembly

    Författare :Simone Pagliano; Frank Niklaus; Göran Stemme; Gijs Krijnen; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; additive manufacturing; 3D printing; 3D micromachining; two-photon polymerization; MEMS; polyimide; ultrafast laser; laser micromachining; vertical integration; magnetic assembly; stochastic assembly; diminutive chips;

    Sammanfattning : The geometry of MEMS devices is limited by the technologies used to fabricate them. Today, microsystems are manufactured with patterning technologies that allow only for 2D and 2.5D geometries. LÄS MER

  5. 14. Integrated Communications and Thermal Management Systems for Microsystem-based Spacecraft : A Multifunctional Microsystem Approach

    Författare :Henrik Kratz; Anders Rydberg; Johan Köhler; Pelle Rangsten; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electronics; nanospacecraft; MST; MEMS; silicon; communication; thermal management; antenna; paraffin; PCM; multifunctional; microsystems; Elektronik; Electronics; Elektronik;

    Sammanfattning : This thesis explores the potential of multifunctional silicon-based microsystems for advanced integrated nanospacecraft (AIN). Especially, multifunctional microsystems with the coexistant functions of communications and thermal management implemented in multilayer silicon stacks are approached with systems study. LÄS MER

  7. 15. Assembly of microsystems for optical and fluidic applications

    Författare :Sjoerd Haasl; Göran Stemme; Richard Syms; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Applied mechanics; microsystem technology; micromachining; assembly; active alignment; BCB; Teknisk mekanik; Engineering mechanics; Teknisk mekanik;

    Sammanfattning : This thesis addresses assembly issues encountered in optical and fluidic microsystem applications. In optics, the first subject concerns the active alignment of components in optical fibersystems. LÄS MER