Sökning: "Silicon Micromachining"

Visar resultat 1 - 5 av 30 avhandlingar innehållade orden Silicon Micromachining.

  1. 1. Silicon micromachining : methodological aspects and applications in biomedical pressure sensors

    Författare :Ylva Bäcklund; Uppsala universitet; []
    Nyckelord :NATURAL SCIENCES; NATURVETENSKAP;

    Sammanfattning : .... LÄS MER

  2. 2. Polymer Microoptics in Silicon Micromachining

    Författare :Karin Hedsten; Chalmers University of Technology; []
    Nyckelord :MOEMS; amorphous fluorocarbon polymer; polymer microlens; silicon micromachining; replication; refractive lenses; diffractive optics; MEMS; Cytop™; transmissive microoptics; reflow;

    Sammanfattning : MEMS (micro-electro-mechanical system) technology is an established field, which makes use of the advanced state of silicon processing to fabricate complex electro-mechanical structures and devices. Microoptics is a new, but advanced technology within the field of optics. LÄS MER

  3. 3. Submillimeter-Wave Waveguide Frontends by Silicon-on-Insulator Micromachining

    Författare :Adrian Gomez-Torrent; Joachim Oberhammer; Umer Shah; Goutam Chattopadhyay; KTH; []
    Nyckelord :ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; antenna; orthomode transducer; switch; waveguide; radiofrequency; beamforming network; submillimeter-wave; terahertz; silicon micromachining; deep reactive ion etching; silicon on insulator; Electrical Engineering; Elektro- och systemteknik;

    Sammanfattning : This thesis presents novel radiofrequency (RF) frontend components in the submillimeter-wave (sub-mmW) range implemented by silicon micromachining, or deep reactive ion etching (DRIE). DRIE is rapidly becoming a driving technology for the fabrication of waveguide components and systems when approaching the terahertz (THz) frequency range. LÄS MER

  4. 4. Exploiting the Terahertz Spectrum with Silicon Micromachining : Waveguide Components, Systems and Metrology

    Författare :James Campion; Joachim Oberhammer; Umer Shah; Robert M. Weikle II; KTH; []
    Nyckelord :ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Terahertz; Silicon Micromachining; Waveguide; Waveguide System; Metrology; Electrical Engineering; Elektro- och systemteknik;

    Sammanfattning : The terahertz spectrum (300 GHz - 3 THz) represents the final frontier for modern electronic and optical systems, wherein few low-cost, volume-manufacturable solutions exist. THz frequencies are of great scientific and commercial interest, with applications as diverse as radio astronomy, sensing and imaging and wireless communications. LÄS MER

  5. 5. Silicon micromachined waveguide components for terahertz systems

    Författare :Bernhard Beuerle; Joachim Oberhammer; Umer Shah; Kamal Sarabandi; KTH; []
    Nyckelord :ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; micromachining; waveguide; terahertz; deep reactive ion etching; silicon on insulator; on-wafer characterization; InP; SiGe; Electrical Engineering; Elektro- och systemteknik;

    Sammanfattning : This thesis presents silicon micromachined waveguide components for sub-terahertz and terahertz (THz) systems fabricated by deep reactive ion etching (DRIE). Historically the main driving force for the development of THz systems has been space-based scientific instruments for astrophysics, planetary and Earth science missions. LÄS MER