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1. 1. Fabrication, Characterization and Applications of Porous Silicon Thin Films and Multilayered Systems

   Författare :Shahin Zangooie; John A. Woollam; Linköpings universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES;

   Sammanfattning : Variable angle spectroscopic ellipsometry was used for characterization of single- as well as multilayered systems of porous silicon. In addition to the complex structures such as Bragg reflectors and Fabry-Pérot filters, more advanced continuos porosity profiles were manufactured in a controlled manner. LÄS MER