Sökning: "Shabnam Mardani"

Hittade 1 avhandling innehållade orden Shabnam Mardani.

  1. 1. Copper and Silver Metallization for High Temperature Applications

    Författare :Shabnam Mardani; Shili Zhang; Hans Norström; Jörgen Olsson; Christophe Detavernier Detavernier; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Metallization; Copper; Silver; Tantalum; High tempreture; Diffussion; Electromigration; Stability;

    Sammanfattning : High-temperature electrical- and morphological-stability of interconnect is critical for electronic systems based on wide band gap (WBG) semiconductors. In this context, the thermal stability of both Ag and Cu films with Ta and TaN films as diffusion barriers and/or surface-capping layers at high temperatures up to 800 oC is investigated in this thesis. LÄS MER