Sökning: "Selective etching"
Visar resultat 1 - 5 av 26 avhandlingar innehållade orden Selective etching.
1. Adhesive Wafer Bonding for Microelectronic and Microelectromechanical Systems
Sammanfattning : Semiconductor wafer bonding has been a subject of interestfor many years and a wide variety of wafer bonding techniqueshave been reported in literature. In adhesive wafer bondingorganic and inorganic adhesives are used as intermediatebonding material. LÄS MER
2. Source and drain engineering in SiGe-based pMOS transistors
Sammanfattning : A new shallow junction formation process, based on selective silicon etching followed by selective growth of in situ B-doped SiGe, is presented. The approach is advantageous compared to conventional ion implantation followed by thermal activation, because perfectly abrupt, low resistivity junctions of arbitrary depth can be obtained. LÄS MER
3. Electrical Characterization of Silicon Nanogaps
Sammanfattning : We have designed and manufactured silicon nanogaps aimed at electrically interfacing molecules, utilizing the precision thickness control in an oxidation process. An insulating layer was formed on a silicon wafer, and then polysilicon was deposited on top. LÄS MER
4. Venturing Further into the Field of 2D Materials and their Laminated Parent Phases
Sammanfattning : The field of 2D materials is a relatively young and rapidly growing area within materials science, which is concerned with atomically thin states of matter. Because of their intrinsic 2D morphology, 2D materials have exceptionally high surface to weight or surface to volume ratio. LÄS MER
5. Silicon nanogaps: An electronic bridge to the molecular world
Sammanfattning : We have designed and manufactured silicon nanogaps aimed at electrically interfacing molecules, utilizing the precision thickness control in an oxidation process. An insulating layer was formed on a silicon wafer, and then polysilicon was deposited on top. LÄS MER