Sökning: "Sara Ghatnekar-nilsson"

Hittade 1 avhandling innehållade orden Sara Ghatnekar-nilsson.

1. 1. Nanomechanical Studies and Applications of Cantilever Sensors

   Författare :Sara Ghatnekar-Nilsson; Fasta tillståndets fysik; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Fysik; Physics; resonating; mass sensor; Young s modulus; CMOS; cantilevers; electron beam lithography; liquid;

   Sammanfattning : Different aspects of cantilevers to be used as sensors have been studied. Silicon cantilevers have been fabricated and integrated on CMOS chips using low-energy electron beam lithography in order to reduce the irradiation damage to the circuits. The released and integrated cantilevers have been tested and used as mass sensors in air. LÄS MER