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1. Manufacturability in the Nanometer Era: Regularity considerations in VLSI Circuits
Sammanfattning : Each reduction of the technology node has, along with improvements in IC fabricationtechnology, been the main driver in delivering the demand for function rich, integratedmobile electronics that are so prevalent. As devices keep growing smaller and geometriesapproach the order of a few atomic layers, it is increasingly difficult to achievecost-effective mass production for reasons related to performance and fabrication capability. LÄS MER
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