Sökning: "Reduced Pressure Chemical Vapor Deposition"

Visar resultat 1 - 5 av 14 avhandlingar innehållade orden Reduced Pressure Chemical Vapor Deposition.

  1. 1. Physical vapor deposition and thermal stability of hard oxide coatings

    Författare :Ludvig Landälv; Per Eklund; Emmanuelle Göthelid; Björn Alling; Marcus Morstein; Linköpings universitet; []
    Nyckelord :ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; NATURAL SCIENCES; NATURVETENSKAP; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; NATURVETENSKAP; TEKNIK OCH TEKNOLOGIER; NATURAL SCIENCES; ENGINEERING AND TECHNOLOGY;

    Sammanfattning : The state-of-the-art tools for machining metals are primarily based on a metal-ceramic composite (WC-Co) coated with different combinations of carbide, nitride, and oxide coatings. Combinations of these coating materials are optimized to withstand specific wear conditions. LÄS MER

  2. 2. Engineering Multicomponent Nanostructures for MOSFET, Photonic Detector and Hybrid Solar Cell Applications

    Författare :Asghar Jamshidi Zavaraki; Hans Ågren; Kevin J. Webb; KTH; []
    Nyckelord :NATURAL SCIENCES; NATURVETENSKAP; NATURVETENSKAP; NATURAL SCIENCES; Epitaxial G rowth; Reduced Pressure Chemical Vapor Deposition; GeSnSiC; MOSFET; Photonic Detector; Resistivity; Phosp hor and Boron doping; Colloidal QDs Sensitized Solar Cell; Cd - free and Cd - based QDs; High Resolution Reciprocal Lattice Map; High Resolution X - Ray Diffraction; High Resolution Transmission Electron Microscopy; High resolution Scanning E lectron Microscopy .;

    Sammanfattning : Silicon technologyhas been seekingfor a monolithic solution for a chip where data processing and data communication is performed in the CMOS part and the photonic component, respectively. Traditionally, silicon has been widely considered for electronic applications but not for photonic applications due to its indirect bandgap nature. LÄS MER

  3. 3. Epitaxy and characterization of SiGeC layers grown by reduced pressure chemical vapor deposition

    Författare :Julius Hållstedt; KTH; []
    Nyckelord :Silicon germanium carbon SiGeC ; Epitaxy; Chemical vapor deposition CVD ; Loading effect; High resolution x-ray diffraction HRXRD ; Hall measurements; Atomic force microscopy AFM .;

    Sammanfattning : Heteroepitaxial SiGeC layers have attracted immenseattention as a material for high frequency devices duringrecent years. The unique properties of integrating carbon inSiGe are the additional freedom for strain and bandgapengineering as well as allowing more aggressive device designdue to the potential for increased thermal budget duringprocessing. LÄS MER

  4. 4. Model-based Analysis and Design of Atomic Layer Deposition Processes

    Författare :Anders Holmqvist; Institutionen för kemiteknik; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Atomic layer deposition; Heterogeneous reaction kinetics; Limit-cycle dynamics; Parameter estimation; Multi-objective optimization; Dynamic optimization; Scale-up analysis;

    Sammanfattning : Atomic layer deposition (ALD) is a thin-film manufacturing process in which the growth surface is exposed to non-overlapping alternating injections of gas-phase chemical precursor species separated by intermediate purge periods to prevent gas-phase reactions. ALD is characterized by sequential self-terminating heterogeneous reactions between highly reactive gas-phase precursor species and surface-bound species which, when allowed sufficient conditions to reach saturation, results in highly conformal films, on both planar and topographically complex structures. LÄS MER

  5. 5. Cutting Edge Titanium-based CVD Hard Coatings

    Författare :Linus von Fieandt; Mats Boman; Ulf Jansson; Erik Lindahl; Tommy Larsson; Henrik Pedersen; Uppsala universitet; []
    Nyckelord :NATURAL SCIENCES; NATURVETENSKAP; NATURVETENSKAP; NATURAL SCIENCES; CVD; Hard coatings; Ti C; N ; TiN;

    Sammanfattning : Modern tools for metal cutting applications, such as turning or milling, are typically improved with a thin protective coating. Despite being only a few microns thick, the coating can increase the lifetime of the tool by more than 100 times compared to an uncoated tool. Two different types of techniques are normally used to deposit the coatings, i. LÄS MER