Sökning: "Reduced Pressure Chemical Vapor Deposition"
Visar resultat 1 - 5 av 15 avhandlingar innehållade orden Reduced Pressure Chemical Vapor Deposition.
1. Surface-Controlled Chemical Vapor Deposition of Silicon Carbide
Sammanfattning : Polycrystalline cubic silicon carbide, 3C-SiC, has long been investigated in the field of hard coating materials. The typical synthesis method for 3C-SiC coatings is thermal chemical vapor deposition (CVD) using either multicomponent precursors, e.g. methyltrichlorosilane, or a combination of single component precursors, e. LÄS MER
2. Epitaxy and characterization of SiGeC layers grown by reduced pressure chemical vapor deposition
Sammanfattning : Heteroepitaxial SiGeC layers have attracted immenseattention as a material for high frequency devices duringrecent years. The unique properties of integrating carbon inSiGe are the additional freedom for strain and bandgapengineering as well as allowing more aggressive device designdue to the potential for increased thermal budget duringprocessing. LÄS MER
3. Model-based Analysis and Design of Atomic Layer Deposition Processes
Sammanfattning : Atomic layer deposition (ALD) is a thin-film manufacturing process in which the growth surface is exposed to non-overlapping alternating injections of gas-phase chemical precursor species separated by intermediate purge periods to prevent gas-phase reactions. ALD is characterized by sequential self-terminating heterogeneous reactions between highly reactive gas-phase precursor species and surface-bound species which, when allowed sufficient conditions to reach saturation, results in highly conformal films, on both planar and topographically complex structures. LÄS MER
4. Corrosion of Ferritic Stainless Steel Interconnects for Solid Oxide Cells – Challenging Operating Conditions
Sammanfattning : Solid oxide cells (SOC) have the potential to revolutionize electricity production by being able to both produce electricity with very high efficiency from a variety of fuels or to produce fuels from electricity and abundant raw materials such as water or carbon dioxide. Some material challenges remain to be solved before large-scale commercialization can be achieved. LÄS MER
5. Physical vapor deposition and thermal stability of hard oxide coatings
Sammanfattning : The state-of-the-art tools for machining metals are primarily based on a metal-ceramic composite (WC-Co) coated with different combinations of carbide, nitride, and oxide coatings. Combinations of these coating materials are optimized to withstand specific wear conditions. LÄS MER