Sökning: "Reactive Ion Etching RIE"

Visar resultat 1 - 5 av 7 avhandlingar innehållade orden Reactive Ion Etching RIE.

  1. 1. High-Aspect Ratio Nanofabrication for Hard X-Ray Zone Plates

    Författare :Karolis Parfeniukas; Ulrich Vogt; Hans Hertz; Anne Sakdinawat; KTH; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; nanofabrication; x-ray optics; zone plate; tungsten; silicon; reactive ion etching; metal-assisted chemical etching; Ronchi test; Fysik; Physics;

    Sammanfattning : Hard x-ray nanoimaging enables structural investigations of new materials for many applications. For high-resolution experiments, zone plate x-ray optics are commonly chosen.Two methods of zone plate nanofabrication are presented in this thesis.Zone plates are circular diffraction gratings with radially decreasing grating period. LÄS MER

  3. 2. Fabrication and Charaterisation of Photonic Integrated Circuits

    Författare :Harendra Fernando; KTH; []
    Nyckelord :Plasma Enhanced Chemical Vapour Deposition PECVD ; Reactive Ion Etching RIE ; Photosensitivity; Bragg-gratings; Optical Add-drop De Multiplexsers;

    Sammanfattning : The past few decades have seen an explosive increase ininformation transfer, fuelled by the enormous growth of theInternet, telecommunication applications, and mass mediasystems in general. Because of the very high bandwidthpotential promised by optical fibre communication technology,the area of all-optical networking has received a great amountof attention. LÄS MER

  4. 3. High-Resolution Nanostructuring for Soft X-Ray Zone-Plate Optics

    Författare :Julia Reinspach; Hans M. Hertz; Sasa Bajt; KTH; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; zone plates; x-ray optics; x-ray microscopy; high resolution; nanofabrication; electron beam lithography; reactive ion etching; tungsten; nickel; germanium;

    Sammanfattning : Diffractive zone-plate lenses are widely used as optics in high-resolution x-ray microscopes. The achievable resolution in such microscopes is presently not limited by the x-ray wavelength but by limitations in zone-plate nanofabrication. LÄS MER

  5. 4. Nanofabrication of Zone Plate Optics for Compact Soft X-Ray Microscopy

    Författare :Anders Holmberg; Hans Hertz; Christian David; KTH; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Physics; Fysik;

    Sammanfattning : This Thesis describes the development of the KTH/Stockholm nanofabrication process for diffractive soft x-ray optics. The effort is motivated by the need for and requirement of specially designed diffractive optics and test objects for compact x-ray microscopy as well as optics for other applications such as phase imaging. LÄS MER

  7. 5. Processing and characterization of GaN/SiC heterojunctions and SiC bipolar transistors

    Författare :Erik Danielsson; KTH; []
    Nyckelord :silicon carbide; gallium nitride; device simulation; bipolar junction transistor; heterojunction; heterojunction bipolar transistor; current-voltage measurement; capacitance-voltage measurement; self-heating;

    Sammanfattning : Silicon Carbide (SiC) and Gallium Nitride (GaN) are bothwide bandgap semiconductors that have been suggested for highpower, high voltage, and high temperature applications. Themost investigated SiC devices so far are the Schottky diode,PiN diode and the field effect transistor. LÄS MER