Sökning: "Plasma enhanced chemical vapor deposition PECVD"

Hittade 5 avhandlingar innehållade orden Plasma enhanced chemical vapor deposition PECVD.

  1. 1. Synthesis and characterization of vertically aligned carbon nanofibers for nanoscale devices

    Författare :Farzan Alavian Ghavanini; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Nanoelectromechanical systems NEMS ; Plasma enhanced chemical vapor deposition PECVD ; Vertically aligned carbon nanofibers VACNF ;

    Sammanfattning : The synthesis of vertically aligned carbon nanofibers (VACNFs) by direct current plasma enhanced chemical vapor deposition (dc PECVD) has presented a unique opportunity to realize nanoscale three-dimensional devices at a reasonable cost. The determinism offered by the synthesis process in terms of control over the spatial and the geometrical properties of the resulting nanofibers provides a powerful tool to implement a wide range of applications from nanoelectromechanical systems to biological devices. LÄS MER

  3. 2. Carbon nanomaterial-based interconnects, integrated capacitors and supercapacitors

    Författare :Muhammad Amin; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; carbon nanotubes; Integrated capacitors; vertically aligned carbon nanofibers; Interconnects; PECVD; Interdigitated micro-supercapacitors;

    Sammanfattning : The constant miniaturization and steady performance improvement of electronics devices have generated innovative ideas such as internet of thing (IoT), which also includes devices with integrated energy sources. The high performance is conceived by the high density of the devices on a chip leading to a high density of interconnects, to connect these devices to outside world. LÄS MER

  4. 3. Toward Carbon based NEMS

    Författare :Farzan Alavian Ghavanini; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; carbon nanotubes CNT ; Nanoelectromechanical systems; and CMOS compatibility ; CNT-based switch; vertically aligned carbon nanofibers VACNF ; NEMS;

    Sammanfattning : A systematic analysis and assessment of carbon nanotube (CNT) based NEMS switches is presented and their features are compared to typical complementary metal-oxide-semiconductor (CMOS) performance parameters. It is shown that CNT-based switches with considerably smaller leakage current compared to CMOS switches can be realized. LÄS MER

  5. 4. Characterization of Nanomaterials for Interconnect and Thermal Management in Electronic Packaging

    Författare :Si Chen; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; heat dissipation; electronic packaging; nanomaterial; characterization; thermal interface material; solder; thermoelectric.; interconnect; through silicon via;

    Sammanfattning : Electronic packaging, protecting the fragile chip from atmosphere and providing the paths for signal transmission as well as heat dissipation, is one of the most important parts in electronic devices. The cost, dimensions, performance, and reliability of an electronic device therefore strongly depend on its packaging structures and materials. LÄS MER

  7. 5. Electron tomography analysis of 3D order and interfacial structure in nano-precipitates

    Författare :Ling Xie; Klaus Leifer; Christian Kübel; Uppsala universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Electron tomography; nanoprecipitate; interfacial structure.; Materialvetenskap; Materials Science;

    Sammanfattning : Structural characterization is essential to understand the formation mechanisms of the nanostructures in thin absorber layers in third generation solar cells and amyloid protein aggregates. Since to the dimension of the precipitated structures is in nanometer scale, electron tomography technique in transmission electron microscopy (TEM) has been applied as a major tool to analyze the 3D order and distribution of precipitates using the electron tomography technique. LÄS MER