Sökning: "Paolo Pavan"

Hittade 1 avhandling innehållade orden Paolo Pavan.

  1. 1. Low-frequency noise in high-k gate stacks with interfacial layer engineering

    Författare :Maryam Olyaei; Bengt Gunnar Malm; Paolo Pavan; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; CMOS; high k; 1 f noise; low-frequency noise; number fluctuations; mobility fluctuat ions; traps; interfacial layer; TmSiO; Tm 2O3; Informations- och kommunikationsteknik; Information and Communication Technology;

    Sammanfattning : The rapid progress of complementary-metal-oxide-semiconductor (CMOS) integrated circuit technology became feasible through continuous device scaling. The implementation of high-k/metal gates had a significantcontribution to this progress during the last decade. However, there are still challenges regarding the reliability of these devices. LÄS MER