Sökning: "Optical MEMS"

Visar resultat 1 - 5 av 17 avhandlingar innehållade orden Optical MEMS.

1. 1. Silicon photonic MEMS building blocks for low-power programmable circuits

   Författare :Pierre Edinger; Kristinn Gylfason; Frank Niklaus; Sangyoon Han; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Photonics; silicon photonics; MEMS; photonic MEMS; 3D printing; liquid crystals; programmable photonics; phase shifters; optical switches; ring resonators; Electrical Engineering; Elektro- och systemteknik;

   Sammanfattning : Silicon photonics, or the confinement and control of light in integrated silicon waveguides, has rapidly grown from research labs to high-end chips for telecommunications. With the associated improvements in waveguide performance, the technology is promising for a wide range of new applications, from computing to sensing. LÄS MER

3. 2. Photonic MEMS for optical information technologies

   Författare :Carlos Errando-Herranz; Kristinn B. Gylfason; Wolfram Pernice; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; Micro-electro-mechanical systems MEMS ; photonics; silicon photonics; photonic integrated circuits PIC ; lithium niobate photonics; ring resonator; polarization beam splitter PBS ; microfluidic integration; lab-on-chip LoC ; optical beam steering; nonlinear optics; Electrical Engineering; Elektro- och systemteknik; Fysik; Physics; Teknisk materialvetenskap; Materials Science and Engineering;

   Sammanfattning : Photonic integrated circuits (PICs) combine hundreds of optical components on a chip, and can enable fast communications, high-performance computing, and improved sensing. PICs, made by miniaturized optical waveguides, require many reconfigurable elements to enable programmable functionalities and to compensate for fabrication variations and environmental factors. LÄS MER

4. 3. Integration of diffractive, refractive and plasmonic optical structures in highly functional MEMS-based scanning and biosensing systems

   Författare :Karin Hedsten; Chalmers tekniska högskola; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; localized surface plasmon resonance; replication; vertical-cavity surface-emitting laser; protein binding; silicon micromachining; polymer micro¬lens; biosensing; MEMS; diffractive microoptics; MOEMS; reflow;

   Sammanfattning : .... LÄS MER

5. 4. Mid-infrared photonic devices for on-chip optical gas sensing

   Författare :Floria Ottonello Briano; Kristinn B. Gylfason; Delphine Marris-Morini; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES; mid-infrared; mid-IR; photonics; silicon photonics; gas sensing; optical sensing; optical gas sensing; spectroscopy; absorption; dispersion; carbon dioxide; CO2; CO2 sensing; trace gas; ethanol sensing; alcohol sensing; waveguide; photonic waveguide; ring resonator; nanowire; nanoheater; emitter; thermal source; bolometer; microbolometer; thermal detector; high frequency; 3 omega method; plasmonic; platinum; Kanthal; silicon-on-insulator; micro-electro-mechanical systems MEMS ; microfabrication; microsystems; microtechnology; nanotechnology; Optik och fotonik; Optics and Photonics; Electrical Engineering; Elektro- och systemteknik;

   Sammanfattning : Gas detection is crucial in a wide range of fields and applications, such as safety and process control in the industry, atmospheric sciences, and breath diagnostics. Optical gas sensing offers some key advantages, compared to other sensing methods such as electrochemical and semiconductor sensing: high specificity, fast response, and minimal drift. LÄS MER

7. 5. Wafer-scale Vacuum and Liquid Packaging Concepts for an Optical Thin-film Gas Sensor

   Författare :Mikael Antelius; Göran Stemme; Yogesh B. Gianchandani; KTH; []
   Nyckelord :Microelectromechanical systems; MEMS; Nanoelectromechanical systems; NEMS; silicon; wafer-level; packaging; vacuum packaging; liquid encapsulation; integration; wire bonding; grating coupler; waveguide; Fabry-Perot resonator;

   Sammanfattning : This thesis treats the development of packaging and integration methods for the cost-efficient encapsulation and packaging of microelectromechanical (MEMS) devices. The packaging of MEMS devices is often more costly than the device itself, partly because the packaging can be crucial for the performance of the device. LÄS MER