Sökning: "Niklaus Frank"

Visar resultat 1 - 5 av 16 avhandlingar innehållade orden Niklaus Frank.

  1. 1. Adhesive Wafer Bonding for Microelectronic and Microelectromechanical Systems

    Författare :Niklaus Frank; KTH; []
    Nyckelord :adhesive; wafer; bonding; low temperature; CMOS compatible; selective; local; polymer; thermoplastic; thermosetting; intermediate layer; coating; benzocyclobutene; BCB; photoresist; epoxy; glue; wafer-level; sacrificial; etching; grinding; etch-stop;

    Sammanfattning : Semiconductor wafer bonding has been a subject of interestfor many years and a wide variety of wafer bonding techniqueshave been reported in literature. In adhesive wafer bondingorganic and inorganic adhesives are used as intermediatebonding material. LÄS MER

  3. 2. Design and Integration of Infrared Absorber Structures into Polymer Membranes based Thermal Detectors

    Författare :Shakeel Ashraf; Göran Thungström; Claes Mattsson; Frank Niklaus; Mittuniversitetet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY;

    Sammanfattning : .... LÄS MER

  4. 3. Heterogeneous 3D Integration and Packaging Technologies for Nano-Electromechanical Systems

    Författare :Simon J. Bleiker; Frank Niklaus; Gary K. Fedder; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Nano-electromechanical systems NEMS ; Micro-electromechanical systems MEMS ; heterogeneous 3D integration; CMOS integration; Morethan- Moore MtM ; adhesive wafer bonding; NEM switch; FPGA; contact reliability; hermetic vacuum packaging; Cu low-temperature welding; through silicon vias TSVs ; magnetic self-assembly;

    Sammanfattning : Three-dimensional (3D) integration of micro- and nano-electromechanical systems (MEMS/NEMS) with integrated circuits (ICs) is an emerging technology that offers great advantages over conventional state-of-the-art microelectronics. MEMS and NEMS are most commonly employed as sensor and actuator components that enable a vast array of functionalities typically not attainable by conventional ICs. LÄS MER

  5. 4. Silicon photonic MEMS building blocks for low-power programmable circuits

    Författare :Pierre Edinger; Kristinn Gylfason; Frank Niklaus; Sangyoon Han; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Photonics; silicon photonics; MEMS; photonic MEMS; 3D printing; liquid crystals; programmable photonics; phase shifters; optical switches; ring resonators; Electrical Engineering; Elektro- och systemteknik;

    Sammanfattning : Silicon photonics, or the confinement and control of light in integrated silicon waveguides, has rapidly grown from research labs to high-end chips for telecommunications. With the associated improvements in waveguide performance, the technology is promising for a wide range of new applications, from computing to sensing. LÄS MER

  7. 5. Bright Lights: Innovative Micro- and Nano-Patterning for Sensing and Tissue Engineering

    Författare :Alessandro Enrico; Göran Stemme; Frank Niklaus; Anna Herland; Jürgen Brugger; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Micro-electromechanical systems MEMS ; nanotechnology; nanowires; microfabrication; tissue engineering; crack-lithography; direct writing; femtosecond lasers; two-photon polymerization; 3D micromachining; cavitation molding; scalable optical patterning; 2D materials; surface structuring; bacterial-surface interaction.; Electrical Engineering; Elektro- och systemteknik;

    Sammanfattning : Light is the primary source of energy on our planet and has been a significant driver in the evolution of human society and technology. Light finds applications in two-dimensional (2D) photolithography and three-dimensional (3D) printing, where a pattern is transferred to a material of interest by ultraviolet (UV) light exposure, and in laser scribing and cutting, where high power lasers are used to pattern the surface of objects or cut through the bulk of the material of interest. LÄS MER