Sökning: "Milan Yazdanfar"
Hittade 1 avhandling innehållade orden Milan Yazdanfar.
1. Precursors and defect control for halogenated CVD of thick SiC epitaxial layers
Sammanfattning : Silicon carbide (SiC) is a very hard semiconductor material with wide band gap, high breakdown electric field strength, high thermal conductivity and high saturation electron drift velocity making it a promising material for high frequency and high power devices. The performance of electrical devices is strongly dependent on the quality, doping level and thickness of the grown epitaxial layers. LÄS MER
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