Sökning: "Microelectronics Mikroelektronik Teknik ballistic Technological sciences Fysik Physics nanowire TBJ"

Hittade 1 avhandling innehållade orden Microelectronics Mikroelektronik Teknik ballistic Technological sciences Fysik Physics nanowire TBJ.

1. 1. Development of Nanoimprint Lithography for Applications in Electronics, Photonics and Life-sciences

   Författare :Patrick Carlberg; Fasta tillståndets fysik; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Mikroelektronik; Microelectronics; Teknik; ballistic; Technological sciences; Fysik; Physics; nanowire; TBJ; cantilever; IDA electrode; sensors; life-science; lift-off; patterning media; anti-sticking; mold; stamp; process development; thermal imprint; nanoimprint lithography; Biotechnology; Bioteknik; nanotechnology; polymer; nanostructure;

   Sammanfattning : This thesis describes different aspects of nanotechnology manufacturing with nanoimprint lithography (NIL), a relatively new nanofabrication tool capable of high resolution and high throughput. Surface structure creation with NIL is based on mechanical deformation of the patterning material. LÄS MER