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1. 1. Nanopatterning by Swift Heavy Ions

   Författare :Marek Skupinski; Klas Hjört; Jens Jensen; Christina Trautmann; Uppsala universitet; []
   Nyckelord :Materials science; swift heavy ions; lithography; nanopatterning; self-assembly; Materialvetenskap;

   Sammanfattning : Today, the dominating way of patterning nanosystems is by irradiation-based lithography (e-beam, DUV, EUV, and ions). Compared to the other irradiations, ion tracks created by swift heavy ions in matter give the highest contrast, and its inelastic scattering facilitate minute widening and high aspect ratios (up to several thousands). LÄS MER