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  1. 1. Chemical vapour deposition of boron-carbon thin films from organoboron precursors

    Författare :Maiwulidan (Mewlude) Yimamu (Imam); Henrik Pedersen; Jens Birch; Carina Höglund; Erik Lindahl; Linköpings universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES;

    Sammanfattning : Boron-carbon (BxC) thin films enriched in 10B are potential neutron converting layers for 10Bbased solid-state neutron detectors given the good neutron absorption cross-section of 10B atoms in the thin film. Chemical Vapour Deposition (CVD) of such films faces the challenge that the maximum temperature tolerated by the aluminium substrate is 660 °C and low temperature CVD routes for BxC films are thus needed. LÄS MER