Sökning: "Lubomyr Romankiw"

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1. 1. High aspect ratio microsystem fabrication by ion track lithography

   Författare :Mikael Lindeberg; Lubomyr Romankiw; Uppsala universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Materials science; Materialvetenskap; Materials science; Teknisk materialvetenskap; materialvetenskap; Materials Science;

   Sammanfattning : The microsystem processing of today is based on an assortment of diverse and contrasting fabrication techniques, sprung from the microelectronic industry. Microsystem technology has primarily been developed to meet the demands for scaled down low-cost sensor and actuator systems. These devices are based on a number of contrasting principles, e.g. LÄS MER