Sökning: "Lech Wosinski"

Hittade 1 avhandling innehållade orden Lech Wosinski.

  1. 1. Technology for photonic components in silica/silicon material structure

    Detta är en avhandling från Kista : Mikroelektronik och informationsteknik

    Författare :Lech Wosinski; KTH.; [2003]
    Nyckelord :silica-on-silicon technology; PECVD; plasma deposition; photonic integrated circuits; planar waveguide devices; UV Bragg gratings; photosensitivity; arrayed waveguide gratings; multimode interference couplers; add-drop multiplexers;

    Sammanfattning : The main objectives of this thesis were to develop a lowtemperature PECVD process suitable for optoelectronicintegration, and to optimize silica glass composition forUV-induced modifications of a refractive index in PECVDfabricated planar devices. The most important achievement isthe successful development of a low temperature silicadeposition, which for the first time makes it is possible tofabricate good quality low loss integrated components whilekeeping the temperature below 250oC during the entirefabrication process. LÄS MER