Sökning: "Lauri Niinisö"

Hittade 1 avhandling innehållade orden Lauri Niinisö.

1. 1. Metal Oxide Thin Films and Nanostructures Made by ALD

   Författare :Mårten Rooth; Anders Hårsta; Jan-Otto Carlsson; Lauri Niinisö; Uppsala universitet; []
   Nyckelord :Inorganic chemistry; Atomic layer deposition; Metal oxide; Nanostructures; Template deposition; Thin films; Oorganisk kemi;

   Sammanfattning : Thin films of cobalt oxide, iron oxide and niobium oxide, and nanostructured thin films of iron oxide, titanium oxide and multilayered iron oxide/titanium oxide have been deposited by Atomic Layer Deposition (ALD). The metal oxides were grown using the precursor combinations CoI2/O2, Fe(Cp)2/O2, NbI5/O2 and TiI4/H2O. LÄS MER