Sökning: "Lars Rymell"

Hittade 1 avhandling innehållade orden Lars Rymell.

1. 1. A new laser-plasma X-ray source for microscopy and lithography

   Författare :Lars Rymell; Atomfysik; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; X-ray microscopy; X-ray lithography; Atomic and molecular physics; multilayer mirror; Fysicumarkivet A:1997:Rymell; Atom- och molekylärfysik; X-ray source; Laser-produced plasma; liquid droplet; debris-free; water window;

   Sammanfattning : A new high-brightness source for soft X-rays and EUV-radiation has been developed. This laser-plasma source utilizes a microscopic liquid droplet or jet as target. The result is a reduction of debris emission by several orders of magnitude compared to conventional laser plasmas. LÄS MER