Sökning: "Lalita Josyula"
Hittade 1 avhandling innehållade orden Lalita Josyula.
1. Stability of point defects in silicon induced by high energy low dose ion implantation
Sammanfattning : Ion implantation is a key' process for the introduction ofdopants in semiconductor technology. It involves bombarding thesubstrate material with energetic ions. LÄS MER
Resultatsidor:
1