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1. 1. Fabrication of Electroacoustic Devices for Integrated Applications

   Författare :Johannes Enlund; Ilia Katardjiev; Jörgen Olsson; Uppsala universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Engineering physics; Teknisk fysik; Elektronik; Electronics;

   Sammanfattning : Electroacoustic technology has in many ways revolutionised the wireless telecommunication industry. The IC compatible fabrication technique of thin film electroacoustic devices has so far provided a considerable increase in device performance and reduction in size. At the moment, new areas where this technology can be of use is under investigation. LÄS MER