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1. 1. Surface-Controlled Chemical Vapor Deposition of Silicon Carbide

   Författare :Jing-Jia Huang; Henrik Pedersen; Urban Forsberg; Örjan Danielsson; Ulf Jansson; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

   Sammanfattning : Polycrystalline cubic silicon carbide, 3C-SiC, has long been investigated in the field of hard coating materials. The typical synthesis method for 3C-SiC coatings is thermal chemical vapor deposition (CVD) using either multicomponent precursors, e.g. methyltrichlorosilane, or a combination of single component precursors, e. LÄS MER