Sökning: "Jing-jia Huang"

Hittade 1 avhandling innehållade orden Jing-jia Huang.

  1. 1. Surface-Controlled Chemical Vapor Deposition of Silicon Carbide

    Författare :Jing-Jia Huang; Henrik Pedersen; Urban Forsberg; Örjan Danielsson; Ulf Jansson; Linköpings universitet; []
    Nyckelord :NATURAL SCIENCES; NATURVETENSKAP; NATURVETENSKAP; NATURAL SCIENCES;

    Sammanfattning : Polycrystalline cubic silicon carbide, 3C-SiC, has long been investigated in the field of hard coating materials. The typical synthesis method for 3C-SiC coatings is thermal chemical vapor deposition (CVD) using either multicomponent precursors, e.g. methyltrichlorosilane, or a combination of single component precursors, e. LÄS MER