Sökning: "High Resolution Scanning Electron Microscopy HRSEM"

Hittade 2 avhandlingar innehållade orden High Resolution Scanning Electron Microscopy HRSEM.

1. 1. Application of SiGe(C) in high performance MOSFETs and infrared detectors

   Författare :Mohammadreza Kolahdouz Esfahani; Henry Radamson; Ya-Hong Xie; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Silicon Germanium Carbon SiGeC ; Reduced Pressure Chemical Vapor Deposition RPCVD ; Epitaxy; Pattern Dependency; MOSFET; Mobility; bolometer; Quantum Well; Infrared IR Detection; Ni Silicide; High Resolution X-ray Diffraction HRXRD ; High Resolution Scanning Electron Microscopy HRSEM ; Electrical engineering; electronics and photonics; Elektroteknik; elektronik och fotonik;

   Sammanfattning : Epitaxially grown SiGe(C) materials have a great importance for many device applications. In these applications, (strained or relaxed) SiGe(C) layers are grown either selectively on the active areas, or on the entire wafer. LÄS MER

3. 2. Heterogeneous Photolytic Synthesis of Nanoparticles

   Författare :Oscar Alm; Klaus Piglmayer; Uppsala universitet; []
   Nyckelord :Chemistry; LCVD; Nanotechnology; Metallocene; Magnetic; Photolysis; OES; tungsten oxide; gas sensing; Kemi;

   Sammanfattning : Nanoparticles of iron, cobalt and tungsten oxide were synthesised by photolytic laser assisted chemical vapour deposition (LCVD). An excimer laser (operating at 193 nm) was used as an excitation source. The LCVD process, was monitored in situ by optical emission spectroscopy (OES). LÄS MER