Sökning: "HIPIMS"

Visar resultat 1 - 5 av 37 avhandlingar innehållade ordet HIPIMS.

  1. 1. The HiPIMS Process

    Författare :Daniel Lundin; Ulf Helmersson; Nils Brenning; Jeffrey A. Hopwood; Linköpings universitet; []
    Nyckelord :TECHNOLOGY; TEKNIKVETENSKAP;

    Sammanfattning : The work presented in this thesis involves experimental and theoretical studies related to a thin film deposition technique called high power impulse magnetron sputtering (HiPIMS), and more specifically the plasma properties and how they influence the coating. HiPIMS is an ionized physical vapor deposition technique based on conventional direct current magnetron sputtering (DCMS). LÄS MER

  3. 2. Engineered ion-bombardment as a tool in thin film deposition

    Författare :Rommel Paulo B. Viloan; Ulf Helmersson; Daniel Lundin; Rainer Hippler; Linköpings universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; HiPIMS; Bipolar HiPIMS; Ion-bombardment; Thin film;

    Sammanfattning : Energetic-ion bombardment has become an attractive route to modify the crystal growth and deposit high quality thin films. In high-power impulse magnetron sputtering (HiPIMS) where the discharge is characterized by a significant amount of ions of the sputter-ejected atoms, energetic-ion bombardment effects could not be underestimated. LÄS MER

  4. 3. Plasma properties in high power impulse magnetron sputtering

    Författare :Daniel Lundin; Ulf Helmersson; Jon Tomas Gudmundsson; Linköpings universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; HiPIMS; HPPMS; plasma; plasma transport; plasma instabilities; Plasma physics; Plasmafysik;

    Sammanfattning : The work presented in this thesis involves experimental and theoretical studies related to plasma properties in high power impulse magnetron sputtering (HiPIMS), and more specifically plasma transport. HiPIMS is an ionized PVD method based on conventional direct current magnetron sputtering (dcMS). LÄS MER

  5. 4. Synthesis and Characterization of Transition Metal Diborides

    Författare :Jimmy Thörnberg; Johanna Rosén; Per Persson; Helmut Riedl; Linköpings universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; DCMS; HiPIMS; Titanium Diboride; Titanium Aluminum Diboride; Chromium Diboride; Microstructure; Hardness; Oxidation Resistance;

    Sammanfattning : This thesis is devoted towards physical vapor deposition (PVD) of thin films of transition-metal (TM) diborides, focused on the material system TiBx, Ti1-xAlxB2-y and CrBx. The metal diborides are a large family of compounds with both metallic and ceramic properties, due to its bonding nature being a mix of covalent and ionic bonds. LÄS MER

  7. 5. Toward Energy-efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating during Magnetron Sputtering by Employing Metal Ion Irradiation

    Författare :Xiao Li; Grzegorz Greczynski; Ivan Petrov; Lars Hultman; Jyh-Wei Lee; Linköpings universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; PVD; Magnetron sputtering; Thin films; HiPIMS; TiAlN; Energy efficiency;

    Sammanfattning : In this Thesis, magnetron sputtering is perfected as an environmental-friendly deposition technique. I performed systematic studies of a novel approach - hybrid high-power impulse and dc magnetron co-sputtering (HiPIMS/DCMS) with metal-ion-synchronized substrate bias pulses. LÄS MER