Sökning: "Gregory S. Girolami"

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1. 1. ZrB2 Thin Films : Growth and Characterization

   Författare :Lina Tengdelius; Hans Högberg; Urban Forsberg; Gregory S. Girolami; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

   Sammanfattning : Zirconium diboride, ZrB2, is a ceramic material with bulk properties such as high melting point (3245 °C), high hardness (23 GPa), and low resistivity (~8 μΩcm). Thin film growth of ZrB2 using physical vapor deposition has suffered from problems with films deviating from stoichiometry and with high levels of contaminants, especially high oxygen content. LÄS MER