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1. 1. Nanoimprint Lithography Based Nanoelectromechanical Device Fabrication

   Författare :Gang Luo; Fasta tillståndets fysik; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

   Sammanfattning : This thesis presents studies concerning the development of nanoimprint lithography technology, nanoimprint lithography-based nanofabrication, as well as the production of NEMS devices and their characterization. It can be divided into the following parts: The first part introduces different NIL stamp fabricating methods and processes. LÄS MER