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Visar resultat 1 - 5 av 6 avhandlingar som matchar ovanstående sökkriterier.

1. 1. Advanced Thin Film Electroacoustic Devices

   Författare :Johan Bjurström; Ilia Katardjiev; Paul Muralt; Uppsala universitet; []
   Nyckelord :Technology; aluminum nitride; FBAR; shear mode resonator; lamb wave devices; liquid sensor; biosensor; temperature compensation; reactive sputtering; TEKNIKVETENSKAP; TECHNOLOGY; TEKNIKVETENSKAP;

   Sammanfattning : The explosive development of the telecom industry and in particular wireless and mobile communications in recent years has lead to a rapid development of new component and fabrication technologies to continually satisfy the mutually exclusive requirements for better performance and miniaturization on the one hand and low cost on the other. A fundamental element in radio communications is time and frequency control, which in turn is achieved by high performance electro-acoustic components made on piezoelectric single crystalline substrates. LÄS MER

3. 2. Electro-Acoustic and Electronic Applications Utilizing Thin Film Aluminium Nitride

   Författare :David Michael Martin; J. Olsson; I. Katardjiev; S. Gevorgian; Uppsala universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; AlN; FBAR; FPAR; CMP; SOI; Nickel Silicide; Wafer Bonding; Electronics; Elektronik; Elektronik; Electronics;

   Sammanfattning : In recent years there has been a huge increase in the growth of communication systems such as mobile phones, wireless local area networks (WLAN), satellite navigation and various other forms of wireless data communication that have made analogue frequency control a key issue. The increase in frequency spectrum crowding and the increase of frequency into microwave region, along with the need for minimisation and capacity improvement, has shown the need for the development of high performance, miniature, on-chip filters operating in the low to medium GHz frequency range. LÄS MER

4. 3. Reactive Sputter Deposition of Functional Thin Films

   Författare :Lina Liljeholm; Jörgen Olsson; Ilia Katardjiev; Tomas Nyberg; Gonzalo Fuentes Iriarte; Uppsala universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; thin film; reactive sputtering; coating; resonator; sensor; FBAR; SMR; aluminum nitride; Al; B N; Teknisk fysik med inriktning mot elektronik; Engineering Science with specialization in Electronics;

   Sammanfattning : Thin film technology is of great significance for a variety of products, such as electronics, anti-reflective or hard coatings, sensors, solar cells, etc. This thesis concerns the synthesis of thin functional films, reactive magnetron sputter deposition process as such and the physical and functional characterization of the thin films synthesized. LÄS MER

5. 4. Thin Film Electroacoustic Devices for Biosensor Applications

   Författare :Gunilla Wingqvist; Ilia Katardjiev; Anita Lloyd Spetz; Kirsi Tappura; Uppsala universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electronics; Elektronik; Elektronik; Electronics;

   Sammanfattning : Biosensors are today important devices within various application areas. In this thesis a new type of label-free biosensor device is studied, which is fabricated using the same processes used for the fabrication of integrated circuits. This enables tighter integration and further sensors/biosensor miniaturization. LÄS MER

7. 5. Advanced MEMS Pressure Sensors Operating in Fluids

   Författare :Emil Anderås; Ventsislav Yantchev; Ilia Katardjiev; Jörgen Olsson; Enrico Verona; Uppsala universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; pressure sensor; piezoresistance; nanofilms; AlN; microacoustic; Lamb wave; thin film; resonator; sensitivity; Teknisk fysik med inriktning mot elektronik; Engineering Science with specialization in Electronics;

   Sammanfattning : Today’s MEMS technology allows manufacturing of miniaturized, low power sensors that sometimes exceeds the performance of conventional sensors. The pressure sensor market today is dominated by MEMS pressure sensors.In this thesis two different pressure sensor techniques are studied. LÄS MER