Sökning: "Etching"

Visar resultat 1 - 5 av 247 avhandlingar innehållade ordet Etching.

  1. 1. Micromachining by sacrificial aluminium etching

    Författare :David Westberg; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; sacrificial aluminium etching; SALE; CMOS-compatible micromachining; aluminium etching; densitometer; surface micromachining; nozzle; sacrificial etching; inkjet;

    Sammanfattning : .... LÄS MER

  3. 2. Ion beam etching of InP based materials

    Författare :Carl-Fredrik Carlström; KTH; []
    Nyckelord :InP; dry etching; ion beam etching; RIBE; CAIBE; hydrocarbon chemistry; trimethylamine; As P exchange reaction; morphology; low damage; AFM; SCM; annealing;

    Sammanfattning : Dry etching is an important technique for pattern transferin fabrication of most opto-electronic devices, since it canprovide good control of both structure size and shape even on asub-micron scale. Unfortunately, this process step may causedamage to the material which is detrimental to deviceperformance. LÄS MER

  4. 3. Epitaxial growth, processing and characterisation of III-V semiconductor micro- and nanostructures

    Författare :Otto Zsebök; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; micromapping; MBE; dry etching; III-V semiconductor; processing; alternative precursor; SEM; photoluminescence; quantum wire; self-narrowing etching; wet chemical etching; MOVPE;

    Sammanfattning : .... LÄS MER

  5. 4. Two-Dimensional Photonic Crystals in InP-based Materials

    Författare :Mikaël Mulot; KTH; []
    Nyckelord :Photonic crystals; photonic bandgap materials; indium phosphide; dry etching; chemically assisted ion beam etching; reactive ion etching; electron beam lithography; photonic integrated circuits; optical waveguides; resonant cavities; optical filterin;

    Sammanfattning : Photonic crystals (PhCs) are structures periodic in thedielectric constant. They exhibit a photonic bandgap, i.e., arange of wavelengths for which light propagation is forbidden. LÄS MER

  7. 5. Fabrication of Low-Dimensional Structures in III-V Semiconductors

    Författare :Ivan Maximov; Fasta tillståndets fysik; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; III-V semiconductors; plasma; etching; aerosol; lithography; quantum dots; quantum well wires; quantum point contact; damage; luminescence; Fysicumarkivet A:1997:Maximov; Halvledarfysik; Semiconductory physics;

    Sammanfattning : The thesis presents studies on the processing technology and the characterization of nanometer-sized and low-dimensional structures in III-V semiconductors. Two major approaches are described: 1) the combination of aerosol technology and plasma etching for the fabrication of quantum dots (QDs) in InP-based materials and 2) the use of high-resolution electron beam lithography and plasma or wet chemical etching to make quantum well wires (QWWs) in both GaAs and InP-based structures. LÄS MER