Sökning: "Deep Reactive Ion Etching"

Visar resultat 1 - 5 av 8 avhandlingar innehållade orden Deep Reactive Ion Etching.

  1. 1. Two-Dimensional Photonic Crystals in InP-based Materials

    Författare :Mikaël Mulot; KTH; []
    Nyckelord :Photonic crystals; photonic bandgap materials; indium phosphide; dry etching; chemically assisted ion beam etching; reactive ion etching; electron beam lithography; photonic integrated circuits; optical waveguides; resonant cavities; optical filterin;

    Sammanfattning : Photonic crystals (PhCs) are structures periodic in thedielectric constant. They exhibit a photonic bandgap, i.e., arange of wavelengths for which light propagation is forbidden. LÄS MER

  3. 2. Submillimeter-Wave Waveguide Frontends by Silicon-on-Insulator Micromachining

    Författare :Adrian Gomez-Torrent; Joachim Oberhammer; Umer Shah; Goutam Chattopadhyay; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; antenna; orthomode transducer; switch; waveguide; radiofrequency; beamforming network; submillimeter-wave; terahertz; silicon micromachining; deep reactive ion etching; silicon on insulator; Electrical Engineering; Elektro- och systemteknik;

    Sammanfattning : This thesis presents novel radiofrequency (RF) frontend components in the submillimeter-wave (sub-mmW) range implemented by silicon micromachining, or deep reactive ion etching (DRIE). DRIE is rapidly becoming a driving technology for the fabrication of waveguide components and systems when approaching the terahertz (THz) frequency range. LÄS MER

  4. 3. Silicon micromachined waveguide components for terahertz systems

    Författare :Bernhard Beuerle; Joachim Oberhammer; Umer Shah; Kamal Sarabandi; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; micromachining; waveguide; terahertz; deep reactive ion etching; silicon on insulator; on-wafer characterization; InP; SiGe; Electrical Engineering; Elektro- och systemteknik;

    Sammanfattning : This thesis presents silicon micromachined waveguide components for sub-terahertz and terahertz (THz) systems fabricated by deep reactive ion etching (DRIE). Historically the main driving force for the development of THz systems has been space-based scientific instruments for astrophysics, planetary and Earth science missions. LÄS MER

  5. 4. Micromachined Interfaces for Medical and Biochemical Applications

    Författare :Patrick Griss; KTH; []
    Nyckelord :Micromachining; Microsystem Technology; Deep Reactive Ion Etching; Medical Microdevices; Biopotential Electrode; Transdermal Drug Delivery; Electrospray; Mass Spectrometry;

    Sammanfattning : .... LÄS MER

  7. 5. Advanced MEMS Technology for Terahertz Frequencies

    Författare :Zhao Xinghai; Joachim Oberhammer; Umer Shah; Oleksandr Glubokov; Jan Stake; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electrical Engineering; Elektro- och systemteknik;

    Sammanfattning : With the development of terahertz (THz) technology, a variety of application demands are growing rapidly, such as high-rate communications, THz radars, environmental monitoring, medical imaging, and space exploration. However, the fabrication, integration, and packaging techniques for THz components and systems pose great challenges for a large-scale, cost-effective production. LÄS MER