Sökning: "DUV-lithography"
Hittade 3 avhandlingar innehållade ordet DUV-lithography.
1. Electrochemical and mechanical thin film sensors
Sammanfattning : This thesis focuses on the study of thin-film sensor technologies, novel microfabrication technologies, and thin-film technology in general. The work discusses electrochemical sensors and mechanical sensor technologies as well as fabrication strategies for them. LÄS MER
2. Bioelectronic Nanosensor Devices for Environmental and Biomedical Analysis
Sammanfattning : A new type of Bioelectronic Nanosensor Device with potential applications in medicine,biotechnology and environmental analysis was designed. The nanosensor is based on RISFET (Regional Ion Sensitive Field Effect Transistor) technology. LÄS MER
3. Laser-Plasma Sources for Extreme-Ultraviolet Lithography
Sammanfattning : This thesis describes the development and characterizationof a liquidxenon- jet laser-plasma source forextreme-ultraviolet (EUV) radiation. It is shown how thissource may be suitable for production-scale EUV lithography(EUVL). LÄS MER