Sökning: "Claes Nender"

Hittade 4 avhandlingar innehållade orden Claes Nender.

  1. 1. Plasma assisted processes for microelectronic applications

    Författare :Claes Nender; Uppsala universitet; []
    Nyckelord :NATURAL SCIENCES; NATURVETENSKAP;

    Sammanfattning : .... LÄS MER

  3. 2. Hollow Cathode Deposition of Thin Films

    Författare :Lars-Erik Gustavsson; Ladislav Bárdoš; Hana Baránková; Claes Nender; Uppsala universitet; []
    Nyckelord :Electronics; Hollow cathode; Hybrid plasma; PVD; TiN films; Ferromagnetic substrates; Magnetized plasma; CrN films; Elektronik;

    Sammanfattning : Thin films of metals and compounds have a very wide range of applications today. Many of the deposition methods used for the production of such films utilize plasma to support the growth the film, e.g. by the supply of energy and the enhancement of reactivity. LÄS MER

  4. 3. Studies of the Reactive Sputtering Process and its Application in Electro-Acoustic Devices

    Författare :Daniel Rosén; Sören Berg; Ilia Katardjiev; Claes Nender; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Materials science; Sputtering; Reactive Sputtering; Electro Acoustic Devices; Materialvetenskap; Materials science; Teknisk materialvetenskap;

    Sammanfattning : Electro-acoustic devices such as surface acoustic wave (SAW) and bulk acoustic wave (BAW) devices have been in commercial use for over 60 years and can be found in applications ranging from specialised scientific and military equipment to consumer products, such as mobile telephones, TV and radio receivers, etc. Today by far the largest market for electro-acoustic devices is the telecommunication industry which annually consumes approximately three billion acoustic wave filters for frequency control alone. LÄS MER

  5. 4. Plasma Enhanced Chemical- and Physical- Vapor Depositions Using Hollow Cathodes

    Författare :Kaspars Siliņš; Hana Barankova; Ladislav Bardos; Claes Nender; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Hollow cathode; TiN; AlN; amorphous carbon; hybrid PVD PE-CVD; ionized magnetron;

    Sammanfattning : Development of coating deposition technologies, in terms of performance and costs, is an ongoing process. A promising class of deposition technologies are based on hollow cathode discharges. LÄS MER