Sökning: "Carina Kylner"

Hittade 1 avhandling innehållade orden Carina Kylner.

1. 1. Light scattering for analysis of thermal stress induced deformation in thin metal films

   Författare :Carina Kylner; KTH; []
   Nyckelord :thin metal films; aluminum; optical quality; hillock; initial stage; lateral distribution; thermal stress; light scattering; instrument.;

   Sammanfattning : Today, thin film based devices are found in a wide field of applications. The main reasons are that thin film technology enables access to unique physical properties and possibilities to miniaturize devices. Thin film devices are generally described in terms such as electrical, optical and magnetical properties. LÄS MER