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  1. 1. Horizontal Slot Waveguides for Silicon Photonics Back-End Integration

    Detta är en avhandling från Stockholm : KTH Royal Institute of Technology

    Författare :Maziar A. M. Naiini; KTH.; [2014]
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; silicon photonics; slot waveguides; grating couplers; CMOS tech- nology; high-k; ALD; germanium photodetectors; graphene photodetectors; pho- tonic integrated circuits;

    Sammanfattning : This thesis presents the development of integrated silicon photonic devices. These devices are compatible with the present and near future CMOS technology. High-khorizontal grating couplers and waveguides are proposed. LÄS MER