Sökning: "Bipolar HiPIMS"

Hittade 1 avhandling innehållade orden Bipolar HiPIMS.

1. 1. Engineered ion-bombardment as a tool in thin film deposition

   Författare :Rommel Paulo B. Viloan; Ulf Helmersson; Daniel Lundin; Rainer Hippler; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; HiPIMS; Bipolar HiPIMS; Ion-bombardment; Thin film;

   Sammanfattning : Energetic-ion bombardment has become an attractive route to modify the crystal growth and deposit high quality thin films. In high-power impulse magnetron sputtering (HiPIMS) where the discharge is characterized by a significant amount of ions of the sputter-ejected atoms, energetic-ion bombardment effects could not be underestimated. LÄS MER