Sökning: "Bernhard Beuerle"

Hittade 1 avhandling innehållade orden Bernhard Beuerle.

1. 1. Silicon micromachined waveguide components for terahertz systems

   Författare :Bernhard Beuerle; Joachim Oberhammer; Umer Shah; Kamal Sarabandi; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; micromachining; waveguide; terahertz; deep reactive ion etching; silicon on insulator; on-wafer characterization; InP; SiGe; Electrical Engineering; Elektro- och systemteknik;

   Sammanfattning : This thesis presents silicon micromachined waveguide components for sub-terahertz and terahertz (THz) systems fabricated by deep reactive ion etching (DRIE). Historically the main driving force for the development of THz systems has been space-based scientific instruments for astrophysics, planetary and Earth science missions. LÄS MER