Sökning: "Arc-evaporation"

Visar resultat 1 - 5 av 11 avhandlingar innehållade ordet Arc-evaporation.

  1. 1. Growth and Characterization of Amorphous Multicomponent Nitride Thin Films

    Författare :Hanna Fager; Lars Hultman; Marcus Morstein; Linköpings universitet; []
    Nyckelord :;

    Sammanfattning : This thesis explores deposition of amorphous thin films based on the two transition metal nitride systems, TiN and HfN. Additions of Si, Al and B have been investigated using three different deposition techniques: dc magnetron sputtering, cathodic arc evaporation, and high power impulse magnetron sputtering (HIPIMS). LÄS MER

  3. 2. TiAlN-based Coatings at High Pressures and Temperatures

    Författare :Robert Pilemalm; Magnus Odén; Mikael Olsson; Rachid M'Saoubi; Mats Jöesaar; Linköpings universitet; []
    Nyckelord :Materials science; thin films; coatings; spinodal decomposition; TiAlN; TiZrAlN; HPHT; high pressure high temperature; BELT-press; transmission electron microscopy; x-ray diifraction; microhardness;

    Sammanfattning : TiAlN and TiAlN-based coatings that are used of relevance as protection of cutting tool inserts used in metal machining have been studied. All coatings were deposited by reactive cathodic arc evaporation using industrial scale deposition systems. The metal content of the coatings was varied by using different combinations of compound cathodes. LÄS MER

  4. 3. Microstructure evolution of Ti-based and Cr cathodes during arc discharging and its impact on coating growth

    Författare :Jianqiang Zhu; Magnus Odén; Johanna Rosén; Lars Hultman; Flavio Soldera; Linköpings universitet; []
    Nyckelord :;

    Sammanfattning : This thesis explores the microstructure evolution of cathodes with various material compositions and grain sizes during cathodic arc evaporation processes as well as the impact on the arc movement, and the microstructure and properties of the deposited nitride coatings. The studied cathode material systems include conventionally metal forged Ti and Ti -Si cathodes, novel Ti3SiC2 MAX-phase cathodes, and dedicatedly designed powder-metallurgical Ti-Si and Cr cathodes with different grain size. LÄS MER

  5. 4. Effect of metal ion irradiation on hard coating synthesis by physical vapor deposition

    Författare :Tun-Wei Hsu; Magnus Odén; Grzegorz Greczynski; Sven Ulrich; Linköpings universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES;

    Sammanfattning : The aim of this thesis is to understand and control how the ions in the plasma influence the film growth during thin film deposition processes. Two physical vapor deposition (PVD) techniques are investigated, namely magnetron sputtering and cathodic arc evaporation. LÄS MER

  7. 5. Growth and Characterization of Ti-Si-N Hard Coatings

    Författare :Axel Flink; Lars Hultman; Johanna Rosén; Linköpings universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Ti-Si-N; physical vapor deposition; nitrides; density functional theory; transmission electron microscopy; nanocomposits; nanolaminates; solid solutions; Material physics with surface physics; Materialfysik med ytfysik;

    Sammanfattning : Metastable (Ti,Si)N alloy and TiN/SiNx multilayer thin solid films as well as SiNx/TiN surfaces have been explored. Cubic Ti1-xSixN (0≤x≤0. LÄS MER