Sökning: "Anette Löfstrand"
Hittade 2 avhandlingar innehållade orden Anette Löfstrand.
1. Block Copolymer Nanolithography for Sub-50 nm Structure Applications
Sammanfattning : As high technology device patterns are continuing to move towards decreasing critical dimensions and increasing pattern density, there is a need for lithography to move in the same direction. Block copolymer (BCP) lithography is a promising technique, which has single digit nanometer resolution, has a pattern periodicity of about 7-200 nm, and easily scales up to large area at a low cost. LÄS MER
2. Block Copolymer Lithography. Applications for Sub-50 nm High-Density Nanostructures
Sammanfattning : As high technology device functionalities seem to constantly be moving towards decreasing critical dimensions and increasing density, there is a need for lithography research to move in the same direction. Block copolymer (BCP) lithography is a promising technique, which has single-digit nanometer resolution, typically has a pattern periodicity of 10-50 nm, and easily scales up the patterned area at a low cost. LÄS MER