Sökning: "selective film"

Visar resultat 21 - 25 av 59 avhandlingar innehållade orden selective film.

  1. 21. AlN and High-k Thin Films for IC and Electroacoustic Applications

    Författare :Fredrik Engelmark; Ivan Petrov; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electronics; Elektronik; Electronics; Elektronik; Elektronik; Electronics;

    Sammanfattning : Further, a highly selective dry etch process for etching Al on AlN has been developed for the fabrication of MIM, MIS, SAW and BAW test structures for electrical and electroacoustic characterization of the films. A dielectric constant of 10 for AlN and 25 for Ti doped Ta2O5 have been measured. LÄS MER

  3. 22. Block Copolymer Lithography. Applications for Sub-50 nm High-Density Nanostructures

    Författare :Anette Löfstrand; NanoLund: Centre for Nanoscience; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

    Sammanfattning : As high technology device functionalities seem to constantly be moving towards decreasing critical dimensions and increasing density, there is a need for lithography research to move in the same direction. Block copolymer (BCP) lithography is a promising technique, which has single-digit nanometer resolution, typically has a pattern periodicity of 10-50 nm, and easily scales up the patterned area at a low cost. LÄS MER

  4. 23. Preparation and characterization of sputtered metal oxides and nitrides for optical applications

    Författare :Monica Veszelei; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Materials science; Materialvetenskap; Materials science; Teknisk materialvetenskap; Solid State Physics; fasta tillståndets fysik;

    Sammanfattning : Sputter deposited metal oxide and nitride thin films have been studied for energy-efficient window applications. Coatings, for both static and dynamic control of radiative heat transfer through windows, were optically characterized. As metal base in static solar selective coatings, semi-transparent TiN and ZrN films have been investigated. LÄS MER

  5. 24. Interrogating Diffusional Mass and Charge Transport in Catalytic Metal-Organic Frameworks

    Författare :Ben A. Johnson; Sascha Ott; Nicolas Plumeré; Uppsala universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; metal-organic frameworks; molecular catalysis; reaction-diffusion; electrochemistry; water oxidation; charge transport;

    Sammanfattning : Molecular catalysts are efficient and selective for the electrochemical conversion of small molecules for energy conversion. Application of molecular species in a large-scale industrial setting requires stabilization in a heterogeneous support material. LÄS MER

  7. 25. Phase Formation of Nanolaminated Transition Metal Carbide Thin Films

    Författare :Chung-Chuan Lai; Johanna Rosén; Per Eklund; Lars Hultman; Miladin Radovic; Linköpings universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES;

    Sammanfattning : Research on inherently nanolaminated transition metal carbides is inspired by their unique properties combining metals and ceramics, such as higher damage tolerance, better machinability and lower brittleness compared to the binary counterparts, yet retaining the metallic conductivity. The interesting properties are related to their laminated structure, composed of transition-metalcarbide layers interleaved by non-transition-metal (carbide) layers. LÄS MER