Sökning: "release etching"
Visar resultat 1 - 5 av 6 avhandlingar innehållade orden release etching.
1. Heterogeneous Integration of Shape Memory Alloysfor High-Performance Microvalves
Sammanfattning : This thesis presents methods for fabricating MicroElectroMechanical System (MEMS) actuators and high-flow gas microvalves using wafer-level integration of Shape Memory Alloys (SMAs) in the form of wires and sheets. The work output per volume of SMA actuators exceeds that of other microactuation mechanisms, such as electrostatic, magnetic and piezoelectric actuation, by more than an order of magnitude, making SMA actuators highly promising for applications requiring high forces and large displacements. LÄS MER
2. Wafer-level heterogeneous integration of MEMS actuators
Sammanfattning : This thesis presents methods for the wafer-level integration of shape memory alloy (SMA) and electrostatic actuators to functionalize MEMS devices. The integration methods are based on heterogeneous integration, which is the integration of different materials and technologies. LÄS MER
3. Metal release from stainless steel and CoCrMo alloys in protein-rich environments – effects of protein aggregation, friction, and irradiation
Sammanfattning : Highly corrosion-resistant alloys are used in sensitive environments such as the human body and food environments. However, even tiny amounts of released metals from these surfaces could potentially cause adverse effects. It is hence important to study the biointerface between corrosion-resistant alloys and protein-rich environments. LÄS MER
4. Micromachined epitaxial colossal mognetoresistors for uncooled infrared bolometer
Sammanfattning : High quality perovskite manganites, La1-xAxMnO3 (A = Ca, Sr, Ba) are very attractive materials due to their great application potential for magnetic memory, uncooled infrared (IR) microbolometer and spintronics devices. This thesis presents studies of the growth and material characterization (including structural, electrical, magnetic and noise) of epitaxial manganite films on Si and GaAs. LÄS MER
5. Superconducting kinetic inductance devices for nanoscale force sensing
Sammanfattning : In this thesis, we present a force sensor for atomic force microscopy based on cavity optomechanical principles. We explain the function, design, fabrication and characterisation of the force sensor. The mechanical part of the force sensor consists of a cantilever with a very fine tip. LÄS MER