Sökning: "electrics"

Hittade 1 avhandling innehållade ordet electrics.

1. 1. High resolution electrical characterization of III-V materials and devices

   Författare :Olivier Douheret; Srinivasan Anand; Wilfried Vandervorst; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electrical engineering; condensed matter; electrics; electrical; materials science; Elektroteknik; elektronik och fotonik; Electrical engineering; electronics and photonics; Elektroteknik; elektronik och fotonik;

   Sammanfattning : The continuing shrinkage of semiconductor devices towards nanoscale features and increased functionality has prompted a strong need for high-resolution characterization tools capable of mapping the electrical properties with nanoscale lateral resolution. In this regard, scanning capacitance microscopy (SCM) scanning spreading resistance microscopy (SSRM) and Kelvin probe force microscopy (KPFM) have emerged as powerful techniques. LÄS MER