Sökning: "acousto-optic deflection"

Hittade 2 avhandlingar innehållade orden acousto-optic deflection.

1. 1. Development of ultra-precision tools for metrology and lithography of large area photomasks and high definition displays

   Författare :Lars Peter Ekberg; Lars Mattsson; Lars Stiblert; Richard Leach; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Ultra precision 2D metrology; LCD-display; OLED-display; nm-resolution; random phase measurement; large area; photomask; acousto-optic deflection; self-calibration; Z-correction; absolute accuracy; uncertainty.; SRA - Production; SRA - Produktion;

   Sammanfattning : Large area flat displays are nowadays considered being a commodity. After the era of bulky CRT TV technology, LCD and OLED have taken over as the most prevalent technologies for high quality image display devices. LÄS MER

3. 2. Ultra precision metrology : the key for mask lithography and manufacturing of high definition displays

   Författare :Peter Ekberg; Lars Mattsson; Torgny Carlsson; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Ultra precision metrology; LCD-display; OLED-display; nm-resolution; large area; random phase measurement; acousto-optic deflection; scanning; 2D measurement; mask; CCD; CMOS; image processing; edge detection; TECHNOLOGY; TEKNIKVETENSKAP; Manufacturing engineering; Produktionsteknik;

   Sammanfattning : Metrology is the science of measurement. It is also a prerequisite for maintaining a high quality in all manufacturing processes. In this thesis we will present the demands and solutions for ultra-precision metrology in the manufacturing of lithography masks for the TV-display industry. LÄS MER