Sökning: "RPECVD"
Hittade 2 avhandlingar innehållade ordet RPECVD.
1. Ultrathin Oxides in Metal-Oxide-Silicon Structures: Defects and Characterization
Sammanfattning : The properties of metal-oxide-silicon (MOS) structures with ultrathin oxide layers (15-30 Å) have been investigated by means of electrical characterization. The characterization methods used were mainly capacitance voltage (C-V), current voltage (I-V) and constant voltage stress (I-t) measurements. LÄS MER
2. Deposition of high quality thin dielectrics on silicon
Sammanfattning : .... LÄS MER
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