Sökning: "Niklas Elfström"
Hittade 1 avhandling innehållade orden Niklas Elfström.
1. Silicon Nanowires for Biomolecule Detection
Sammanfattning : Starting from silicon on insulator (SOI) material, with a top silicon layer thickness of 100 nm, silicon nanowires were fabricated in a top down approach using electron beam (e-beam) lithography and subsequent eactive ion etching (RIE) and oxidation. Nanowires as narrow as 30 nm could be achieved. LÄS MER
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