Sökning: "Metallic source drain"

Hittade 4 avhandlingar innehållade orden Metallic source drain.

  1. 1. Integration of metallic source/drain contacts in MOSFET technology

    Författare :Jun Luo; Mikael Östling; Shi-Li Zhang; Anthony O'Neill; KTH; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; CMOS technology; MOSFET; Schottky barrier MOSFET; metallic source drain; contact resistivity; NiSi; PtSi; SALICIDE; ultrathin silicide; FinFET; Semiconductor physics; Halvledarfysik;

    Sammanfattning : The continuous and aggressive downscaling of conventional CMOS devices has been driving the vast growth of ICs over the last few decades. As the CMOS downscaling approaches the fundamental limits, novel device architectures such as metallic source/drain Schottky barrier MOSFET (SB-MOSFET) and SB-FinFET are probably needed to further push the ultimate downscaling. LÄS MER

  3. 2. Fabrication, characterization, and modeling of metallic source/drain MOSFETs

    Författare :Valur Gudmundsson; Per-Erik Hellström; Yee-Chia Yeo; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Metallic source drain; contact resistivity; Monte Carlo; NiSi; PtSi; SOI; UTB; tri-gate; FinFET; multiple-gate; nanowire; MOSFET; CMOS; Schottky barrier; silicide; SALICIDE;

    Sammanfattning : As scaling of CMOS technology continues, the control of parasitic source/drain (S/D) resistance (RSD) is becoming increasingly challenging. In order to control RSD, metallic source/drain MOSFETs have attracted significant attention, due to their low resistivity, abrupt junction and low temperature processing (≤700 °C). LÄS MER

  4. 3. Modelling of Quantum Transport in Nanostructures

    Författare :Dan Csontos; Fasta tillståndets fysik; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; ballistic transport; quantum wire; quantum dot; resonant tunnelling; three-terminal; disorder; Physics; Fysik; Fysicumarkivet A:2002:Csontos; scattering matrix; quantum transport;

    Sammanfattning : In this thesis, theoretical studies of the transport properties of three nanoscale systems: one-dimensional (1D) quantum wires (QWRs), zero-dimensional (0D), laterally confined, double-barrier resonant tunnelling structures (DBRTSs) and three-terminal ballistic junctions (TBJs), have been performed. In the first part of the thesis, an overview of the realization and properties of such systems is given along with a description of modelling tools used in the calculations. LÄS MER

  5. 4. Epitaxial growth of semiconductor nanowires

    Författare :Ann Persson; Fasta tillståndets fysik; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; materialteknik; nanowires; nanostructures; growth mechanism; Materiallära; Material technology; Halvledarfysik; Semiconductory physics; nanoelectronics; Au; VSS; VLS; surface diffusion; band gap engineering; InP; ternary system; GaAs; heterostructures; InAs; CBE; epitaxy;

    Sammanfattning : This thesis describes the results obtained from investigations carried out on epitaxially grown III-V semiconductor nanowires aimed at improving our understanding of and knowledge on the growth mechanism of nanowires. This is important to be able to control their growth, in order to make future applications possible. LÄS MER