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  1. 1. Thin Films and Deposition Processes Studied by Soft X-Ray Spectroscopy

    Författare :Björn Gålnander; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Materials science; Materialvetenskap; Materials science; Teknisk materialvetenskap; Solid State Physics; fasta tillståndets fysik;

    Sammanfattning : This thesis deals with studies of thin films using soft x-ray emission spectroscopy. Thin films are frequently used in optical, semiconductor and magnetic applications, and along with the development of thin film deposition techniques, there is a growing need for thin film characterisation and production control. LÄS MER